物质在纳米尺度下表现出的奇异现象和规律将改变相关理论的现有框架，使人们对物质世的认识进入到崭新的阶段。用微纳米加工方法对微纳米材料、器件等进行微结构表征、操纵、控制、加工等，测量其力、热、光、电、磁等低维物理特性，开展相关基础理论、方法研究和设备改造、研制，对纳米科技的发展具有重要的意义。本书主要包括扫描电子显微学、透射电子显微学、聚焦离子束和电子束纳米加工技术、氦离子显微学等的基础理论，通过一些典型的应用介绍如何运用这些方法实施对材料及其结构的表征、加工等。
王荣明，北京科技大学教授，数理学院院长 。中国材料研究学会青年委员会第四届理事会理事，中国金属学会材料科学分会第五届理事会理事，中国航空学会第六届材料工程专业分会委员。
1 Electron/Ion Optics
1.1 General ray diagram of TEM
1.2 Electron sources
1.3 Optics
1.4 Detectors
1.5 Ion optics
2 Scanning Electron Microscopy
2.1 Introduction
2.2 Fundamentals of the SEM
2.3 Analytical capabilities of the SEM
3 Transmission Electron Microscopy
3.1 Introduction
3.2 High-resolution transmission electron microscopy imaging
3.3 A new approach to image analysis in HRTEM
3.4 Focal series reconstruction
3.5 Convergent beam electron di?raction
3.6 Lorentz electron microscopy
3.7 Electron holography
4 Scanning Transmission Electron Microscopy (STEM)
4.1 Introduction
4.2 The Principle of reciprocity
4.3 Principle of STEM imaging
4.4 HAADF imaging
4.5 ABF imaging
4.6 Scanning Moir?e fringe imaging
4.7 Application on micro-area analysis
4.8 Discussion and conclusion
5 Spectroscopy
5.1 Introduction
5.2 Principle of EDS and EELS
5.3 EDS+TEM and EDS+STEM
5.4 EELS-TEM
5.5 EELS-STEM and applications
5.6 Spectrum imaging
6 Aberration Corrected Transmission Electron Microscopy and Its
Applications
6.1 Basics of aberration correction
6.2 Aberration corrected electron microscopy
6.3 Applications of aberration corrected electron microscopy
7 In Situ TEM: Theory and Applications
7.1 In situ TEM observation of deformation-induced structural evolution
at atomic resolution for strained materials
7.2 In situ TEM investigations on Ga/In ˉlled nanotubes
7.3 In situ TEM electrical measurements
7.4 Several advanced electron microscopy methods and their
applications on materials science
8 Helium Ion Microscopy
8.1 Introduction
8.2 Principles￠
8.3 Imaging techniques
8.4 Applications
8.5 Current/Future developments
8.6 Conclusion
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